Single Source Precursors in FEBID and FIBID: Similarities and Differences for CoSix Deposition

F. Jungwirth, F. Porrati, Daniel Knez, Harald Plank, Michael Huth, Sven Barth

Publikation: KonferenzbeitragPoster


One of the main challenges currently encountered in focused electron (FEBID) and ion beam induced deposition(FIBID) is the availability of suitable precursor molecules for desired material compositions [1]. Besides the depositionof single metal deposits, the deposition of binary materials with defined stoichiometry is very challenging. Anattractive approach to simplify the challenging task for metal silicides is the use of heterometallic precursors whichalready possess the desired constituent stoichiometry. This contribution compares two precursors for theFEBID/FIBID deposition of CoSix-based materials of predefined composition, H3SiCo(CO)4 and H2Si(Co(CO)4)2.
PublikationsstatusVeröffentlicht - 2022
Veranstaltung8th FEBIP Workshop of the Focused-Electron-Beam-Induced-Processing: FEBIP 2022 - Krakow, Krakow, Polen
Dauer: 12 Juli 202215 Juli 2022


Konferenz8th FEBIP Workshop of the Focused-Electron-Beam-Induced-Processing
KurztitelFEBIP 2022

ASJC Scopus subject areas

  • Allgemeine Materialwissenschaften

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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