Robust multivariate process control of multiway data in semiconductor fabrication

Peter Scheibelhofer, Günter Hayderer, Ernst Stadlober

Publikation: Konferenzbeitrag › (Altdaten) Vortrag oder Präsentation

Originalsprache	englisch
Publikationsstatus	Veröffentlicht - 22 Sept. 2014
Veranstaltung	Annual Conference of the European Network for Business and Industrial Statistics - Linz, Österreich Dauer: 22 Sept. 2014 → 25 Sept. 2014

Konferenz	Annual Conference of the European Network for Business and Industrial Statistics
Kurztitel	ENBIS 14
Land/Gebiet	Österreich
Ort	Linz
Zeitraum	22/09/14 → 25/09/14

Fields of Expertise

@conference{2098ca5d2d374103884d4f26fd24849e,

title = "Robust multivariate process control of multiway data in semiconductor fabrication",

author = "Peter Scheibelhofer and G{\"u}nter Hayderer and Ernst Stadlober",

year = "2014",

month = sep,

day = "22",

language = "English",

note = "ENBIS-14, ENBIS 14 ; Conference date: 22-09-2014 Through 25-09-2014",

}

TY - CONF

T1 - Robust multivariate process control of multiway data in semiconductor fabrication

AU - Scheibelhofer, Peter

AU - Hayderer, Günter

AU - Stadlober, Ernst

PY - 2014/9/22

Y1 - 2014/9/22

UR - http://www.enbis.org/activities/events/current/253_ENBIS_14/?_ts=1&_ts=1

M3 - (Old data) Lecture or Presentation

T2 - ENBIS-14

Y2 - 22 September 2014 through 25 September 2014

ER -