Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures

Robert Winkler, Aleksandra Szkudlarek, Ivo Utke, Harald Plank

Publikation: KonferenzbeitragPosterForschung

Originalspracheenglisch
PublikationsstatusVeröffentlicht - 2013
VeranstaltungMNE - 39th International Conference on Micro and Nano Engineering - London
Dauer: 16 Sep 201319 Sep 2013

Konferenz

KonferenzMNE - 39th International Conference on Micro and Nano Engineering
OrtLondon
Zeitraum16/09/1319/09/13

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Dieses zitieren

Winkler, R., Szkudlarek, A., Utke, I., & Plank, H. (2013). Precursor Gas Dynamics as Crucial Element during Focused Electron Beam Induced Deposition of Functional Nanostructures. Postersitzung präsentiert bei MNE - 39th International Conference on Micro and Nano Engineering, London, .