Poly(2-Oxazoline)-based Toolkit for High-Resolution-Photoresists with Tailor-made Adhesion

Martin Fimberger, Verena Schenk, Elisabeth Rossegger, Frank Wiesbrock

Publikation: Beitrag in Buch/Bericht/Konferenzband › Beitrag in Buch/Bericht

Originalsprache	englisch
Titel	Advances in Polymer Science and Technology
Erscheinungsort	Linz
Herausgeber (Verlag)	Trauner Verlag
Seiten	20-20
Auflage	Band 3
ISBN (Print)	978-3-99033-195-8
Publikationsstatus	Veröffentlicht - 2013

Fields of Expertise

@inbook{0c43d3b262064d54a3dd1f7a85fdf649,

title = "Poly(2-Oxazoline)-based Toolkit for High-Resolution-Photoresists with Tailor-made Adhesion",

author = "Martin Fimberger and Verena Schenk and Elisabeth Rossegger and Frank Wiesbrock",

year = "2013",

language = "English",

isbn = "978-3-99033-195-8",

pages = "20--20",

booktitle = "Advances in Polymer Science and Technology",

publisher = "Trauner Verlag ",

address = "Austria",

edition = "Band 3",

}