Poly(2-Oxazoline)-based Toolkit for High-Resolution-Photoresists with Tailor-made Adhesion

Martin Fimberger, Verena Schenk, Elisabeth Rossegger, Frank Wiesbrock

Publikation: Konferenzbeitrag › (Altdaten) Vortrag oder Präsentation

Originalsprache	englisch
Publikationsstatus	Veröffentlicht - 9 Sep. 2013
Veranstaltung	Advances in Polymer Science and Technology: APST 2009 - Linz, Österreich Dauer: 8 Juli 2009 → 10 Juli 2009

Konferenz	Advances in Polymer Science and Technology
Kurztitel	APST
Land/Gebiet	Österreich
Ort	Linz
Zeitraum	8/07/09 → 10/07/09

Fields of Expertise

@conference{663ba1b479204d8bbeacc79ff238cf65,

title = "Poly(2-Oxazoline)-based Toolkit for High-Resolution-Photoresists with Tailor-made Adhesion",

author = "Martin Fimberger and Verena Schenk and Elisabeth Rossegger and Frank Wiesbrock",

year = "2013",

month = sep,

day = "9",

language = "English",

note = "Advances in Polymer Science and Technology (APST) 1 : APST 2009, APST ; Conference date: 08-07-2009 Through 10-07-2009",

}