Piezoelectricity of zinc oxide thin films deposited by plasma enhanced atomic layer deposition

Taher Abu Ali, Julian Pilz, Philipp Schäffner, Barbara Stadlober, Anna Maria Coclite

Publikation: KonferenzbeitragPoster

Abstract

Investigation of the piezoelectric response of zinc oxide films prepared by plasma-enhanced atomic layer deposition (PE-ALD). The influence of the substrate as well as the substrate temperature during deposition is investigated. Films deposited on flexible polyethylene terephthalate (PET) generated higher piezoelectric current (> 1.8 nA) compared to films deposited on glass (> 0.3 nA) due to substrate bending. The generated piezoelectric current is enhanced at increased temperatures due to improved growth along the (002) crystallographic orientation.
Originalspracheenglisch
PublikationsstatusVeröffentlicht - 28 Sep 2020

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