Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

Taher Abu Ali, Julian Pilz, Philipp Schäffner, Markus Kratzer, Christian Teichert , Barbara Stadlober, Anna Maria Coclite*

*Korrespondierende/r Autor/in für diese Arbeit

Publikation: Beitrag in einer FachzeitschriftArtikel

Abstract

Zinc oxide (ZnO) thin films are deposited by plasma‐enhanced atomic layer deposition (PE‐ALD). This deposition method allows depositing stoichiometric and highly resistive ZnO films at room temperature. Despite such important requirements for piezoelectricity being met, not much is known in literature about the piezoelectric properties of ZnO thin films (<70 nm) deposited by PE‐ALD. The films are grown at different substrate temperatures to investigate the effect on crystalline and piezoelectric properties. Films deposited on flexible poly(ethylene terephthalate) (PET) generated a higher piezoelectric current (>1.8 nA) and charge (>80 pC) compared with films deposited on glass (>0.3 nA and >30 pC) due to bending effects of the substrate when mechanically excited. Furthermore, increasing the substrate temperature, during deposition, enhances the growth along the (002) crystallographic orientation, which further strengthens the generated piezoelectric current signal for mechanical excitations along the ZnO film's c‐axis.
Originalspracheenglisch
Aufsatznummer2000319
Seitenumfang6
FachzeitschriftPhysica Status Solidi / A
Jahrgang217
Ausgabenummer21
Frühes Online-Datum26 Aug 2020
DOIs
PublikationsstatusVeröffentlicht - Nov 2020

ASJC Scopus subject areas

  • !!Electronic, Optical and Magnetic Materials
  • !!Condensed Matter Physics
  • !!Materials Chemistry
  • !!Surfaces, Coatings and Films
  • !!Electrical and Electronic Engineering
  • !!Surfaces and Interfaces

Fields of Expertise

  • Advanced Materials Science

Fingerprint Untersuchen Sie die Forschungsthemen von „Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition“. Zusammen bilden sie einen einzigartigen Fingerprint.

Dieses zitieren