Optimization of the FIB milling conditions for RTP-processed Niobium and Tantalumnitride thin films on silicon substrates

Publikation: Konferenzbeitrag › Poster

Originalsprache	englisch
Publikationsstatus	Veröffentlicht - 2005
Veranstaltung	Microscopy Conference 2005 - 6.Dreiländertagung 2005: MC05 - Davos, Schweiz Dauer: 28 Aug. 2005 → 2 Sept. 2005

Konferenz	Microscopy Conference 2005 - 6.Dreiländertagung 2005
Land/Gebiet	Schweiz
Ort	Davos
Zeitraum	28/08/05 → 2/09/05

Dieses zitieren

@conference{af868cf591a44dc28f6d207149f1639b,

title = "Optimization of the FIB milling conditions for RTP-processed Niobium and Tantalumnitride thin films on silicon substrates",

author = "Martina Dienstleder and Michael Rogers and Gerald Kothleitner and Ferdinand Hofer and Bernd Kolbesen",

year = "2005",

language = "English",

note = "Microscopy Conference 2005 - 6.Dreil{\"a}ndertagung 2005 : MC05 ; Conference date: 28-08-2005 Through 02-09-2005",

}

TY - CONF

T1 - Optimization of the FIB milling conditions for RTP-processed Niobium and Tantalumnitride thin films on silicon substrates

AU - Dienstleder, Martina

AU - Rogers, Michael

AU - Kothleitner, Gerald

AU - Hofer, Ferdinand

AU - Kolbesen, Bernd

PY - 2005

Y1 - 2005

M3 - Poster

T2 - Microscopy Conference 2005 - 6.Dreiländertagung 2005

Y2 - 28 August 2005 through 2 September 2005

ER -