Observer-based temperature control of an LED heated silicon wafer

Martin Kleindienst, Markus Reichhartinger, Martin Horn, Felix Staudegger

Publikation: Beitrag in einer FachzeitschriftArtikelForschungBegutachtung

Originalspracheenglisch
Seiten (von - bis)96-108
FachzeitschriftJournal of Process Control
Jahrgang70
DOIs
PublikationsstatusVeröffentlicht - 2018

Dies zitieren

Observer-based temperature control of an LED heated silicon wafer. / Kleindienst, Martin; Reichhartinger, Markus; Horn, Martin; Staudegger, Felix.

in: Journal of Process Control, Jahrgang 70, 2018, S. 96-108.

Publikation: Beitrag in einer FachzeitschriftArtikelForschungBegutachtung

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title = "Observer-based temperature control of an LED heated silicon wafer",
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