Modeling the Growth of Tin Dioxide using Spray Pyrolysis Deposition for Gas Sensor Applications

Lado Filipovic; Siegfried Selberherr; Giorgio Cataldo Mutinati; Elise Brunet; Stephan Steinhauer; Anton Köck; Jordi Teva; Jochen Kraft; Jörg Siegert; Franz Schrank; Christian Gspan; Werner Grogger

doi:10.1109/TSM.2014.2298883

Modeling the Growth of Tin Dioxide using Spray Pyrolysis Deposition for Gas Sensor Applications

Lado Filipovic, Siegfried Selberherr, Giorgio Cataldo Mutinati, Elise Brunet, Stephan Steinhauer, Anton Köck, Jordi Teva, Jochen Kraft, Jörg Siegert, Franz Schrank, Christian Gspan, Werner Grogger

Institut für Elektronenmikroskopie und Nanoanalytik (5190)

Publikation: Beitrag in einer Fachzeitschrift › Artikel › Begutachtung

Originalsprache	englisch
Seiten (von - bis)	269-277
Fachzeitschrift	IEEE Transactions on Semiconductor Manufacturing
Jahrgang	27
Ausgabenummer	2
DOIs	https://doi.org/10.1109/TSM.2014.2298883
Publikationsstatus	Veröffentlicht - 2014

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Zugriff auf Dokument

10.1109/TSM.2014.2298883

Dieses zitieren

Filipovic, L., Selberherr, S., Mutinati, G. C., Brunet, E., Steinhauer, S., Köck, A., Teva, J., Kraft, J., Siegert, J., Schrank, F., Gspan, C., & Grogger, W. (2014). Modeling the Growth of Tin Dioxide using Spray Pyrolysis Deposition for Gas Sensor Applications. IEEE Transactions on Semiconductor Manufacturing , 27(2), 269-277. https://doi.org/10.1109/TSM.2014.2298883

Modeling the Growth of Tin Dioxide using Spray Pyrolysis Deposition for Gas Sensor Applications. / Filipovic, Lado; Selberherr, Siegfried; Mutinati, Giorgio Cataldo; Brunet, Elise; Steinhauer, Stephan; Köck, Anton; Teva, Jordi; Kraft, Jochen; Siegert, Jörg; Schrank, Franz; Gspan, Christian; Grogger, Werner.

in: IEEE Transactions on Semiconductor Manufacturing , Jahrgang 27, Nr. 2, 2014, S. 269-277.

Publikation: Beitrag in einer Fachzeitschrift › Artikel › Begutachtung

Filipovic, Lado ; Selberherr, Siegfried ; Mutinati, Giorgio Cataldo ; Brunet, Elise ; Steinhauer, Stephan ; Köck, Anton ; Teva, Jordi ; Kraft, Jochen ; Siegert, Jörg ; Schrank, Franz ; Gspan, Christian ; Grogger, Werner. / Modeling the Growth of Tin Dioxide using Spray Pyrolysis Deposition for Gas Sensor Applications. in: IEEE Transactions on Semiconductor Manufacturing . 2014 ; Jahrgang 27, Nr. 2. S. 269-277.

@article{86b3295bb79f4924aacf91dec48feffb,

title = "Modeling the Growth of Tin Dioxide using Spray Pyrolysis Deposition for Gas Sensor Applications",

author = "Lado Filipovic and Siegfried Selberherr and Mutinati, {Giorgio Cataldo} and Elise Brunet and Stephan Steinhauer and Anton K{\"o}ck and Jordi Teva and Jochen Kraft and J{\"o}rg Siegert and Franz Schrank and Christian Gspan and Werner Grogger",

year = "2014",

doi = "10.1109/TSM.2014.2298883",

language = "English",

volume = "27",

pages = "269--277",

journal = "IEEE Transactions on Semiconductor Manufacturing ",

issn = "0894-6507",

publisher = "Institute of Electrical and Electronics Engineers",

number = "2",

}

TY - JOUR

T1 - Modeling the Growth of Tin Dioxide using Spray Pyrolysis Deposition for Gas Sensor Applications

AU - Filipovic, Lado

AU - Selberherr, Siegfried

AU - Mutinati, Giorgio Cataldo

AU - Brunet, Elise

AU - Steinhauer, Stephan

AU - Köck, Anton

AU - Teva, Jordi

AU - Kraft, Jochen

AU - Siegert, Jörg

AU - Schrank, Franz

AU - Gspan, Christian

AU - Grogger, Werner

PY - 2014

Y1 - 2014

U2 - 10.1109/TSM.2014.2298883

DO - 10.1109/TSM.2014.2298883

M3 - Article

VL - 27

SP - 269

EP - 277

JO - IEEE Transactions on Semiconductor Manufacturing

JF - IEEE Transactions on Semiconductor Manufacturing

SN - 0894-6507

IS - 2

ER -