Materials synthesis and processing by deep X-ray lithography

Benedetta Marmiroli; Paolo Falcaro; Luca Malfatti; Marco Faustini; Cara M. Doherty; David Grosso; Plinio Innocenzi; Heinz Amenitsch

Materials synthesis and processing by deep X-ray lithography

Benedetta Marmiroli, Paolo Falcaro, Luca Malfatti, Marco Faustini, Cara M. Doherty, David Grosso, Plinio Innocenzi, Heinz Amenitsch

Institut für Anorganische Chemie (6330)

Publikation: Konferenzbeitrag › Poster

Originalsprache	englisch
Publikationsstatus	Veröffentlicht - 2013
Veranstaltung	HARMNST 2013 (10th International Workshop on High Aspect Ratio Micro and Nano System Technology) - Berlin Dauer: 21 Apr. 2013 → 24 Apr. 2013

Konferenz

Konferenz	HARMNST 2013 (10th International Workshop on High Aspect Ratio Micro and Nano System Technology)
Ort	Berlin
Zeitraum	21/04/13 → 24/04/13

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Application
Experimental

Andere Dateien und Links

http://www.harmnst2013.org/

Dieses zitieren

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title = "Materials synthesis and processing by deep X-ray lithography",

author = "Benedetta Marmiroli and Paolo Falcaro and Luca Malfatti and Marco Faustini and Doherty, {Cara M.} and David Grosso and Plinio Innocenzi and Heinz Amenitsch",

year = "2013",

language = "English",

note = "HARMNST 2013 (10th International Workshop on High Aspect Ratio Micro and Nano System Technology) ; Conference date: 21-04-2013 Through 24-04-2013",

}

TY - CONF

T1 - Materials synthesis and processing by deep X-ray lithography

AU - Marmiroli, Benedetta

AU - Falcaro, Paolo

AU - Malfatti, Luca

AU - Faustini, Marco

AU - Doherty, Cara M.

AU - Grosso, David

AU - Innocenzi, Plinio

AU - Amenitsch, Heinz

PY - 2013

Y1 - 2013

UR - http://www.harmnst2013.org/

M3 - Poster

T2 - HARMNST 2013 (10th International Workshop on High Aspect Ratio Micro and Nano System Technology)

Y2 - 21 April 2013 through 24 April 2013

ER -