Lithography of porous materials for devices fabrication

Paolo Falcaro, Plinio Innocenzi, Anita J. Hill, Cara Doherty

Publikation: Beitrag in Buch/Bericht/KonferenzbandBeitrag in einem KonferenzbandForschungBegutachtung

Abstract

Advanced porous materials open up new frontiers for sensing, drug delivery and host matrices for biomedical applications because selective/active release/sequestration of precise molecules is expected. Different types of materials are currently being investigated and paths which move between material optimization and patterning processes are clearly observed for mesoporous materials. Here we present our recent progress on lithographic methodologies to achieve such spatial control for ceramic mesoporous coatings with a particular focus on metal organic frameworks for emerging sensing technology.

Originalspracheenglisch
TitelProceedings of SPIE - The International Society for Optical Engineering
Band8204
DOIs
PublikationsstatusVeröffentlicht - 2011
Extern publiziertJa
VeranstaltungSmart Nano-Micro Materials and Devices - Hawthorn, VIC, Australien
Dauer: 5 Dez 20117 Dez 2011

Konferenz

KonferenzSmart Nano-Micro Materials and Devices
LandAustralien
OrtHawthorn, VIC
Zeitraum5/12/117/12/11

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Schlagwörter

    ASJC Scopus subject areas

    • Angewandte Mathematik
    • !!Computer Science Applications
    • !!Electrical and Electronic Engineering
    • !!Electronic, Optical and Magnetic Materials
    • !!Condensed Matter Physics

    Dieses zitieren

    Falcaro, P., Innocenzi, P., Hill, A. J., & Doherty, C. (2011). Lithography of porous materials for devices fabrication. in Proceedings of SPIE - The International Society for Optical Engineering (Band 8204). [82041X] https://doi.org/10.1117/12.904854