Investigation of the influence of unwanted micro lenses caused by semiconductor processing excursions on optical behavior of CMOS photodiodes

Andrea Kraxner, Jong Mun Park , Rainer Minixhofer

Publikation: Beitrag in Buch/Bericht/KonferenzbandBeitrag in einem KonferenzbandForschungBegutachtung

Originalspracheenglisch
Titel Physics and Simulation of Optoelectronic Devices XXIII
Band23
DOIs
PublikationsstatusVeröffentlicht - 2015
Extern publiziertJa

Publikationsreihe

NameSPIE Proc.
Band9357

Dieses zitieren

Kraxner, A., Park , J. M., & Minixhofer, R. (2015). Investigation of the influence of unwanted micro lenses caused by semiconductor processing excursions on optical behavior of CMOS photodiodes. in Physics and Simulation of Optoelectronic Devices XXIII (Band 23). (SPIE Proc.; Band 9357). https://doi.org/10.1117/12.2079022