@article{8d872cec096943adb616b3630ccbab60,
title = "Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC",
author = "Stefan Kirnst{\"o}tter and Faccinelli, {Martin Mario} and Peter Hadley and Reinhart Job and Werner Schustereder and Johannes Laven and Hans-Joachim Schulze",
year = "2013",
doi = "10.1149/05005.0115ecst",
language = "English",
volume = "50",
pages = "145--160",
journal = "ECS Transactions",
issn = "1938-6737",
publisher = "Electrochemical Society, Inc.",
number = "5",
}