Initiated PECVD of organosilicon coatings: A new strategy to enhance monomer structure retention

Anna Maria Coclite, Karen K. Gleason*

*Korrespondierende/r Autor/-in für diese Arbeit

Publikation: Beitrag in einer FachzeitschriftArtikelBegutachtung


A new deposition method, initiated PECVD (iPECVD), is proposed for the formation of organosilicon polymers with enhanced monomer structure retention compared to conventional PECVD. The quasi-selective fragmentation of an initiator is driven by a low power plasma discharge, as opposed to using a hot filament for initiator decomposition as in a standard, plasma-free initiated CVD (iCVD). The weak peroxide bond (O-O) in the initiator permits the formation of radical species at very low plasma power density (0.07W·cm -2). Kinetic analysis of the deposition process indicates that the film formation rate follows the Arrhenius law, similarly to other iCVD process from organosilicon monomers. Herein we show a new deposition method, initiated-PECVD (iPECVD), as an alternative to iCVD and PECVD, for the monomers that are not easily polymerizable by iCVD (e.g., the organosilicon monomers) but where a certain structure retention is needed. The addition of a radical initiator allows to ignite a plasma discharge at plasma density as low as 0.07W·cm -2. In this condition the carbon content of the monomer molecule is completely retained and at reasonably high deposition rate.

Seiten (von - bis)425-434
FachzeitschriftPlasma Processes and Polymers
PublikationsstatusVeröffentlicht - 1 Apr 2012
Extern publiziertJa

ASJC Scopus subject areas

  • Physik der kondensierten Materie
  • Polymere und Kunststoffe


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