Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current

Stefan Kirnstötter; Martin Mario Faccinelli; Johannes Laven; Werner Schustereder; Hans-Joachim Schulze; Reinhart Job; Peter Hadley

doi:10.1149/04901.0475ecst

Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current

Stefan Kirnstötter, Martin Mario Faccinelli, Johannes Laven, Werner Schustereder, Hans-Joachim Schulze, Reinhart Job, Peter Hadley

Institut für Festkörperphysik (5130)

Publikation: Beitrag in einer Fachzeitschrift › Artikel

Originalsprache	englisch
Seiten (von - bis)	483-489
Fachzeitschrift	ECS Transactions
Jahrgang	49
DOIs	https://doi.org/10.1149/04901.0475ecst
Publikationsstatus	Veröffentlicht - 2012

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Application
Experimental

Zugriff auf Dokument

10.1149/04901.0475ecst

Dieses zitieren

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author = "Stefan Kirnst{\"o}tter and Faccinelli, {Martin Mario} and Johannes Laven and Werner Schustereder and Hans-Joachim Schulze and Reinhart Job and Peter Hadley",

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AU - Kirnstötter, Stefan

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AU - Laven, Johannes

AU - Schustereder, Werner

AU - Schulze, Hans-Joachim

AU - Job, Reinhart

AU - Hadley, Peter

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