High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition

Robert Winkler; Georg Arnold; Roland Schmied; Angelina Orthacker; Jason D. Fowlkes; R. Timilsina; Aleksandra Szkudlarek; Ivo Utke; Philip D. Rack; Gerald Kothleitner; Harald Plank

High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition

Robert Winkler, Georg Arnold, Roland Schmied, Angelina Orthacker, Jason D. Fowlkes, R. Timilsina, Aleksandra Szkudlarek, Ivo Utke, Philip D. Rack, Gerald Kothleitner, Harald Plank

Institut für Elektronenmikroskopie und Nanoanalytik (5190)

Publikation: Konferenzbeitrag › Poster

Originalsprache	englisch
Publikationsstatus	Veröffentlicht - 2015
Veranstaltung	EIPBN 2015 - San Diego Dauer: 25 Mai 2015 → 31 Mai 2015

Konferenz

Konferenz	EIPBN 2015
Ort	San Diego
Zeitraum	25/05/15 → 31/05/15

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Dieses zitieren

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title = "High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition",

author = "Robert Winkler and Georg Arnold and Roland Schmied and Angelina Orthacker and Fowlkes, {Jason D.} and R. Timilsina and Aleksandra Szkudlarek and Ivo Utke and Rack, {Philip D.} and Gerald Kothleitner and Harald Plank",

year = "2015",

language = "English",

note = "EIPBN 2015 ; Conference date: 25-05-2015 Through 31-05-2015",

}

TY - CONF

T1 - High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition

AU - Winkler, Robert

AU - Arnold, Georg

AU - Schmied, Roland

AU - Orthacker, Angelina

AU - Fowlkes, Jason D.

AU - Timilsina, R.

AU - Szkudlarek, Aleksandra

AU - Utke, Ivo

AU - Rack, Philip D.

AU - Kothleitner, Gerald

AU - Plank, Harald

PY - 2015

Y1 - 2015

M3 - Poster

T2 - EIPBN 2015

Y2 - 25 May 2015 through 31 May 2015

ER -