Fundamental resolution limits during focused electron beam induced deposition on bulk substrates

Georg Arnold; Roland Schmied; R. Timilsina; J.D. Fowlkes; Angelina Orthacker; Gerald Kothleitner; P.D. Rack; Harald Plank

Fundamental resolution limits during focused electron beam induced deposition on bulk substrates

Georg Arnold, Roland Schmied, R. Timilsina, J.D. Fowlkes, Angelina Orthacker, Gerald Kothleitner, P.D. Rack, Harald Plank

Institut für Elektronenmikroskopie und Nanoanalytik (5190)

Publikation: Konferenzbeitrag › (Altdaten) Vortrag oder Präsentation

Originalsprache	englisch
Publikationsstatus	Veröffentlicht - 22 Juli 2014
Veranstaltung	FEBIP 2014 - Frankfurt, Deutschland Dauer: 22 Juli 2014 → …

Konferenz

Konferenz	FEBIP 2014
Land/Gebiet	Deutschland
Ort	Frankfurt
Zeitraum	22/07/14 → …

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)
Experimental

Dieses zitieren

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title = "Fundamental resolution limits during focused electron beam induced deposition on bulk substrates",

author = "Georg Arnold and Roland Schmied and R. Timilsina and J.D. Fowlkes and Angelina Orthacker and Gerald Kothleitner and P.D. Rack and Harald Plank",

year = "2014",

month = jul,

day = "22",

language = "English",

note = "FEBIP 2014 ; Conference date: 22-07-2014",

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TY - CONF

T1 - Fundamental resolution limits during focused electron beam induced deposition on bulk substrates

AU - Arnold, Georg

AU - Schmied, Roland

AU - Timilsina, R.

AU - Fowlkes, J.D.

AU - Orthacker, Angelina

AU - Kothleitner, Gerald

AU - Rack, P.D.

AU - Plank, Harald

PY - 2014/7/22

Y1 - 2014/7/22

M3 - (Old data) Lecture or Presentation

T2 - FEBIP 2014

Y2 - 22 July 2014

ER -