Experimental evaluation of Environmental Scanning Electron Microscopes at high chamber pressure [200 - 4000 Pascal]

Publikation: Konferenzbeitrag › Poster

Originalsprache	englisch
Publikationsstatus	Veröffentlicht - 2014
Veranstaltung	18th IMC 2014 Prag - Prag, Tschechische Republik Dauer: 7 Sept. 2014 → 12 Sept. 2014

Fields of Expertise

@conference{0079ce093e424dda9e14c9fc4713afef,

title = "Experimental evaluation of Environmental Scanning Electron Microscopes at high chamber pressure [200 - 4000 Pascal]",

author = "Johannes Rattenberger and Fitzek, {Harald Matthias} and Julian Wagner and Hartmuth Schr{\"o}ttner and Ferdinand Hofer",

year = "2014",

language = "English",

note = "18th IMC 2014 Prag ; Conference date: 07-09-2014 Through 12-09-2014",

}