Expanding High-fidelity 3D-Nanoprinting - From Meshes toward Closed Structures

Publikation: KonferenzbeitragPoster

Abstract

3D nanoprinting via Focused Electron Beam Induced Deposition 3 D FEBID is one of the few additive, direct write methods capable ofproducing real 3 D objects on the nanoscale With feature sizes below 100 nm on a regular basis and various possibilities in substrate andprecursor materials, it is a highly flexible technique with numerous potential applications 1 2 3 In the past, 3 D FEBID was mainly used forbuilding mesh like structures 4 This project focuses on the expansion towards closed structures, where additional growth affecting factors, suchas edge effects and more advanced temperature distributions apply (Fig 1 We approach the situation with a combination of experiments andsimulations to develop a compensation tool for arising challenges, which forms the basis of next generation 3 D nanoprinting via electrons 5
Originalspracheenglisch
PublikationsstatusVeröffentlicht - 21 Apr. 2022
Veranstaltung12th ASEM Workshop: Austrian Society for Electron Microscopy - JKU Linz, Linz, Österreich
Dauer: 21 Apr. 202222 Apr. 2022
https://asem.at/events/12th-asem-workshop/

Konferenz

Konferenz12th ASEM Workshop
Land/GebietÖsterreich
OrtLinz
Zeitraum21/04/2222/04/22
Internetadresse

ASJC Scopus subject areas

  • Allgemeine Materialwissenschaften

Fields of Expertise

  • Advanced Materials Science

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

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