Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy

Werner Grogger, Ferdinand Hofer, Peter Warbichler, O. Leitner

Publikation: Beitrag in Buch/Bericht/KonferenzbandBeitrag in einem KonferenzbandForschungBegutachtung

Originalspracheenglisch
TitelMicroscopy of semiconducting materials 1999
ErscheinungsortBristol
Herausgeber (Verlag)Institute of Physics Publ.
Seiten35-38
Band164
ISBN (Print)0-7503-0650-5
PublikationsstatusVeröffentlicht - 1999
VeranstaltungConference on Microscopy of Semiconducting Materials - Oxford, Großbritannien / Vereinigtes Königreich
Dauer: 22 Mär 199925 Mär 1999

Publikationsreihe

NameInstitute of Physics conference series
Herausgeber (Verlag)Institute of Physics Publ.

Konferenz

KonferenzConference on Microscopy of Semiconducting Materials
LandGroßbritannien / Vereinigtes Königreich
OrtOxford
Zeitraum22/03/9925/03/99

Treatment code (Nähere Zuordnung)

  • Basic - Fundamental (Grundlagenforschung)

Dies zitieren

Grogger, W., Hofer, F., Warbichler, P., & Leitner, O. (1999). Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy. in Microscopy of semiconducting materials 1999 (Band 164, S. 35-38). (Institute of Physics conference series). Bristol: Institute of Physics Publ..

Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy. / Grogger, Werner; Hofer, Ferdinand; Warbichler, Peter; Leitner, O.

Microscopy of semiconducting materials 1999. Band 164 Bristol : Institute of Physics Publ., 1999. S. 35-38 (Institute of Physics conference series).

Publikation: Beitrag in Buch/Bericht/KonferenzbandBeitrag in einem KonferenzbandForschungBegutachtung

Grogger, W, Hofer, F, Warbichler, P & Leitner, O 1999, Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy. in Microscopy of semiconducting materials 1999. Bd. 164, Institute of Physics conference series, Institute of Physics Publ., Bristol, S. 35-38, Oxford, Großbritannien / Vereinigtes Königreich, 22/03/99.
Grogger W, Hofer F, Warbichler P, Leitner O. Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy. in Microscopy of semiconducting materials 1999. Band 164. Bristol: Institute of Physics Publ. 1999. S. 35-38. (Institute of Physics conference series).
Grogger, Werner ; Hofer, Ferdinand ; Warbichler, Peter ; Leitner, O. / Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy. Microscopy of semiconducting materials 1999. Band 164 Bristol : Institute of Physics Publ., 1999. S. 35-38 (Institute of Physics conference series).
@inproceedings{b8d6c9f850564dc0a40f92f14e859311,
title = "Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy",
author = "Werner Grogger and Ferdinand Hofer and Peter Warbichler and O. Leitner",
year = "1999",
language = "English",
isbn = "0-7503-0650-5",
volume = "164",
series = "Institute of Physics conference series",
publisher = "Institute of Physics Publ.",
pages = "35--38",
booktitle = "Microscopy of semiconducting materials 1999",

}

TY - GEN

T1 - Elemental mapping of semiconductor devices using energyfiltering transmission electron microscopy

AU - Grogger, Werner

AU - Hofer, Ferdinand

AU - Warbichler, Peter

AU - Leitner, O.

PY - 1999

Y1 - 1999

M3 - Conference contribution

SN - 0-7503-0650-5

VL - 164

T3 - Institute of Physics conference series

SP - 35

EP - 38

BT - Microscopy of semiconducting materials 1999

PB - Institute of Physics Publ.

CY - Bristol

ER -