Abstract
Metal–organic frameworks (MOFs) offer disruptive potential in micro- and optoelectronics because of the unique properties of these microporous materials. Nanoscale patterning is a fundamental step in the implementation of MOFs in miniaturized solid-state devices. Conventional MOF patterning methods suffer from low resolution and poorly defined pattern edges. Here, we demonstrate the resist-free, direct X-ray and electron-beam lithography of MOFs. This process avoids etching damage and contamination and leaves the porosity and crystallinity of the patterned MOFs intact. The resulting high-quality patterns have excellent sub-50-nm resolution, and approach the mesopore regime. The compatibility of X-ray and electron-beam lithography with existing micro- and nanofabrication processes will facilitate the integration of MOFs in miniaturized devices.
Originalsprache | englisch |
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Seiten (von - bis) | 93-99 |
Seitenumfang | 7 |
Fachzeitschrift | Nature Materials |
Jahrgang | 20 |
Ausgabenummer | 1 |
DOIs | |
Publikationsstatus | Veröffentlicht - Jan. 2021 |
ASJC Scopus subject areas
- Physik der kondensierten Materie
- Werkstoffmechanik
- Maschinenbau
- Chemie (insg.)
- Werkstoffwissenschaften (insg.)