@inproceedings{c392d4793a914bb08e77bfde7b72f844,
title = "Design Issues of BAW Employment in 3D integrated Sensor Nodes",
author = "Josef Prainsack and Markus Dielacher and Martin Flatscher and Thomas Herndl and Rainer Matischek and J{\"o}rn Stolle and Werner Weber",
year = "2009",
language = "English",
pages = "81--85",
booktitle = "Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS",
publisher = ".",
note = "Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS ; Conference date: 01-04-2009 Through 03-04-2009",
}