Deep X-ray lithography on "sol-gel" processed noble metal mesoarchitectured films

Maxime Gayrard; Benedetta Marmiroli; Francois Chancerel; Philippe Decorse; Heinz Amenitsch; Jennifer Peron; Andrea Cattoni; Marco Faustini

doi:10.1039/d1nr07455e

Deep X-ray lithography on "sol-gel" processed noble metal mesoarchitectured films

Maxime Gayrard, Benedetta Marmiroli, Francois Chancerel, Philippe Decorse, Heinz Amenitsch, Jennifer Peron, Andrea Cattoni, Marco Faustini^*

^*Korrespondierende/r Autor/-in für diese Arbeit

Institut für Anorganische Chemie (6330)

Publikation: Beitrag in einer Fachzeitschrift › Artikel › Begutachtung

Abstract

Noble metal coordination xerogel films (mesostructured with block-copolymers) exhibit solubility switching with increasing X-ray irradiation. Different from other sol-gel systems, these are attributed to film deconstruction under irradiation. These materials can be used as recyclable negative tone resists for deep X-ray lithography that can be further converted into metallic nanoarchitectured films.

Originalsprache	englisch
Seiten (von - bis)	1706-1712
Seitenumfang	7
Fachzeitschrift	Nanoscale
Jahrgang	14
Ausgabenummer	5
DOIs	https://doi.org/10.1039/d1nr07455e
Publikationsstatus	Veröffentlicht - 7 Feb. 2022

ASJC Scopus subject areas

Werkstoffwissenschaften (insg.)

Fields of Expertise

Advanced Materials Science

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10.1039/d1nr07455e

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abstract = "Noble metal coordination xerogel films (mesostructured with block-copolymers) exhibit solubility switching with increasing X-ray irradiation. Different from other sol-gel systems, these are attributed to film deconstruction under irradiation. These materials can be used as recyclable negative tone resists for deep X-ray lithography that can be further converted into metallic nanoarchitectured films. ",

author = "Maxime Gayrard and Benedetta Marmiroli and Francois Chancerel and Philippe Decorse and Heinz Amenitsch and Jennifer Peron and Andrea Cattoni and Marco Faustini",

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AU - Gayrard, Maxime

AU - Marmiroli, Benedetta

AU - Chancerel, Francois

AU - Decorse, Philippe

AU - Amenitsch, Heinz

AU - Peron, Jennifer

AU - Cattoni, Andrea

AU - Faustini, Marco

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AB - Noble metal coordination xerogel films (mesostructured with block-copolymers) exhibit solubility switching with increasing X-ray irradiation. Different from other sol-gel systems, these are attributed to film deconstruction under irradiation. These materials can be used as recyclable negative tone resists for deep X-ray lithography that can be further converted into metallic nanoarchitectured films.

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Deep X-ray lithography on "sol-gel" processed noble metal mesoarchitectured films

Abstract

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