CVD of polymeric thin films: Applications in sensors, biotechnology, microelectronics/organic electronics, microfluidics, MEMS, composites and membranes

Gozde Ozaydin-Ince*, Anna Maria Coclite, Karen K. Gleason

*Korrespondierende/r Autor/in für diese Arbeit

Publikation: Beitrag in einer FachzeitschriftReview eines Fachbereichs (Review article)

Abstract

Polymers with their tunable functionalities offer the ability to rationally design micro- and nano-engineered materials. Their synthesis as thin films have significant advantages due to the reduced amounts of materials used, faster processing times and the ability to modify the surface while preserving the structural properties of the bulk. Furthermore, their low cost, ease of fabrication and the ability to be easily integrated into processing lines, make them attractive alternatives to their inorganic thin film counterparts. Chemical vapor deposition (CVD) as a polymer thin-film deposition technique offers a versatile platform for fabrication of a wide range of polymer thin films preserving all the functionalities. Solventless, vapor-phase deposition enable the integration of polymer thin films or nanostructures into micro- and nanodevices for improved performance. In this review, CVD of functional polymer thin films and the polymerization mechanisms are introduced. The properties of the polymer thin films that determine their behavior are discussed and their technological advances and applications are reviewed.

Originalspracheenglisch
Aufsatznummer016501
FachzeitschriftReports on Progress in Physics
Jahrgang75
Ausgabenummer1
DOIs
PublikationsstatusVeröffentlicht - 1 Jan 2012
Extern publiziertJa

ASJC Scopus subject areas

  • !!Physics and Astronomy(all)

Fingerprint

Untersuchen Sie die Forschungsthemen von „CVD of polymeric thin films: Applications in sensors, biotechnology, microelectronics/organic electronics, microfluidics, MEMS, composites and membranes“. Zusammen bilden sie einen einzigartigen Fingerprint.

Dieses zitieren