Controlling Chemistry, Structure and Volume Growth Rate via Process Parameters of Electron Beam Induced Deposition

Publikation: Konferenzbeitrag › Poster

Originalsprache	englisch
Publikationsstatus	Veröffentlicht - 2009
Veranstaltung	Microscopy Conference 2009: MC09 - Congress Graz, Graz, Österreich Dauer: 30 Aug. 2009 → 4 Sept. 2009

Treatment code (Nähere Zuordnung)

@conference{d10bb1c041744236b972d27ab4254cb0,

title = "Controlling Chemistry, Structure and Volume Growth Rate via Process Parameters of Electron Beam Induced Deposition",

author = "Harald Plank and Thomas Haber and Christian Gspan and Gerald Kothleitner and Ferdinand Hofer",

year = "2009",

language = "English",

note = "MC 2009 - Microscopy Conference 2009 in Graz, Austria : MC09, MC ; Conference date: 30-08-2009 Through 04-09-2009",

}

TY - CONF

T1 - Controlling Chemistry, Structure and Volume Growth Rate via Process Parameters of Electron Beam Induced Deposition

AU - Plank, Harald

AU - Haber, Thomas

AU - Gspan, Christian

AU - Kothleitner, Gerald

AU - Hofer, Ferdinand

PY - 2009

Y1 - 2009

M3 - Poster

T2 - MC 2009 - Microscopy Conference 2009 in Graz, Austria

Y2 - 30 August 2009 through 4 September 2009

ER -