Comparison of 3D Surface Reconstruction Data from Certified Depth Standards Obtained by SEM and an Infinite Focus Measurement Machine (IFM)

Hartmuth Schröttner; Mario Schmied; Stefan Scherer

doi:10.1007/s00604-006-0556-3

Comparison of 3D Surface Reconstruction Data from Certified Depth Standards Obtained by SEM and an Infinite Focus Measurement Machine (IFM)

Hartmuth Schröttner, Mario Schmied, Stefan Scherer

Institut für Elektronenmikroskopie und Nanoanalytik (5190)

Publikation: Beitrag in einer Fachzeitschrift › Artikel › Begutachtung

Originalsprache	englisch
Seiten (von - bis)	279-284
Fachzeitschrift	Microchimica Acta
Jahrgang	155
DOIs	https://doi.org/10.1007/s00604-006-0556-3
Publikationsstatus	Veröffentlicht - 2006

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Zugriff auf Dokument

10.1007/s00604-006-0556-3

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author = "Hartmuth Schr{\"o}ttner and Mario Schmied and Stefan Scherer",

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AU - Schmied, Mario

AU - Scherer, Stefan

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