Characterization of silicon wafer surfaces by FTIR-, XPS-spectroscopy and contact angle measurements

Thomas Bodner, Andreas Behrendt, Emil Prax, Frank Wiesbrock, Franz Stelzer

Publikation: Konferenzbeitrag › Poster

Originalsprache	englisch
Publikationsstatus	Veröffentlicht - 2009
Veranstaltung	European Polymer Congress: EPF '09 - Graz, Österreich Dauer: 12 Juli 2009 → 17 Juli 2009

Treatment code (Nähere Zuordnung)

@conference{dddd951c53cc469095872fb35f34a822,

title = "Characterization of silicon wafer surfaces by FTIR-, XPS-spectroscopy and contact angle measurements",

author = "Thomas Bodner and Andreas Behrendt and Emil Prax and Frank Wiesbrock and Franz Stelzer",

year = "2009",

language = "English",

note = "EPF'09 - European Polymer Congress : EPF '09 ; Conference date: 12-07-2009 Through 17-07-2009",

}