Abstract
We present the integration of thin film SnO2 gas sensor on CMOS microchips. A spray pyrolysis process was used to deposit the gas sensitive film, with a thickness of 50 nm, on CMOS microhotplates. The exposure of the CMOS integrated gas sensor to carbon monoxide at different operating temperatures and humidity levels lead to a significant decrease in the sensor resistance. At an operating temperature of 375 °C a sensor response of almost 50% was achieved. The integration of the sensing material on CMOS microhotplates makes it possible to reduce the size and power consumption of metal oxide gas sensors
Originalsprache | englisch |
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Seiten (von - bis) | 7128-7131 |
Fachzeitschrift | Materials Today: Proceedings |
Jahrgang | 4 |
Ausgabenummer | 7,2 |
DOIs | |
Publikationsstatus | Veröffentlicht - 2017 |
ASJC Scopus subject areas
- Werkstoffwissenschaften (insg.)
Fields of Expertise
- Advanced Materials Science
Treatment code (Nähere Zuordnung)
- Application