@article{3d9279ce0a694239ad9eb4e58cfceb26,
title = "Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers",
keywords = "Mesoporous films, Humidity sensor",
author = "Christian Ganser and Gerhard Fritz-Popovski and R Morak and Parvin Sharifi and Benedetta Marmiroli and Barbara Sartori and Heinz Amenitsch and Thomas Grie{\ss}er and Teichert Christian and Oskar Paris",
year = "2016",
doi = "10.3762/bjnano.7.56",
language = "English",
pages = "637",
journal = "Beilstein Journal of Nanotechnology ",
issn = "2190-4286",
publisher = "Beilstein-Institut zur F{\"o}rderung der Chemischen Wissenschaften",
number = "7",
}