Abstract
Herein aconvenient synthetic method to obtain2,2,3,3-tetrasilyltetrasilane 3 and 2,2,3,3,4,4-hexasilylpentasi-lane 4 on amultigram scale is presented. Proton-coupled29Si NMR spectroscopyand single-crystal X-raycrystallogra-phy enabled unequivocal structural assignment. Owing to theirunique properties,which are reflected in their nonpyrophoriccharacter on contact with air and their enhanced lightabsorption above 250 nm, 3 and 4 are valuable precursorsfor liquid-phase deposition (LPD) and the processing of thinsilicon films.Amorphous silicon (a-Si:H) films of excellentquality were deposited starting from 3 and characterized byconductivity measurements,ellipsometry,optical microscopy,and Raman spectroscopy.
Originalsprache | englisch |
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Seiten (von - bis) | 14259-14262 |
Fachzeitschrift | Angewandte Chemie |
Jahrgang | 56 |
DOIs | |
Publikationsstatus | Veröffentlicht - 2017 |
ASJC Scopus subject areas
- Werkstoffwissenschaften (insg.)
Fields of Expertise
- Advanced Materials Science
Treatment code (Nähere Zuordnung)
- Basic - Fundamental (Grundlagenforschung)