An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps

Bernhard Geiger, Stefan Schrunner, Roman Kern

Publikation: KonferenzbeitragAbstractForschungBegutachtung

Originalspracheenglisch
PublikationsstatusVeröffentlicht - Apr 2019
VeranstaltungEuropean Advanced Process Control and Manufacturing Conference - Villach, Villach, Österreich
Dauer: 8 Apr 201910 Apr 2019
http://www.apcm-europe.eu

Konferenz

KonferenzEuropean Advanced Process Control and Manufacturing Conference
Kurztitelapc|m
LandÖsterreich
OrtVillach
Zeitraum8/04/1910/04/19
Internetadresse

Dies zitieren

Geiger, B., Schrunner, S., & Kern, R. (2019). An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps. Abstract von European Advanced Process Control and Manufacturing Conference, Villach, Österreich.

An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps. / Geiger, Bernhard; Schrunner, Stefan; Kern, Roman.

2019. Abstract von European Advanced Process Control and Manufacturing Conference, Villach, Österreich.

Publikation: KonferenzbeitragAbstractForschungBegutachtung

Geiger, B, Schrunner, S & Kern, R 2019, 'An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps' European Advanced Process Control and Manufacturing Conference, Villach, Österreich, 8/04/19 - 10/04/19, .
Geiger B, Schrunner S, Kern R. An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps. 2019. Abstract von European Advanced Process Control and Manufacturing Conference, Villach, Österreich.
Geiger, Bernhard ; Schrunner, Stefan ; Kern, Roman. / An Information-Theoretic Measure for Pattern Similarity in Analog Wafermaps. Abstract von European Advanced Process Control and Manufacturing Conference, Villach, Österreich.
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