An EBIC and SRP study on thermal donors in proton implanted p-type magnetic Czochralski silicon

Martin Faccinelli, Stefan Kirnstötter, Werner Schustereder, Johannes G. Laven, Peter Hadley

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@article{10e50add9c0b4714a31fe19872bd3143,

title = "An EBIC and SRP study on thermal donors in proton implanted p-type magnetic Czochralski silicon",

author = "Martin Faccinelli and Stefan Kirnst{\"o}tter and Werner Schustereder and Laven, {Johannes G.} and Peter Hadley",

year = "2014",

doi = "DOI: 10.1002/pssc.201400045",

language = "English",

pages = "1610--1642",

journal = "Physica Status Solidi / C",

issn = "1610-1634",

publisher = "Wiley-VCH ",

}

TY - JOUR

T1 - An EBIC and SRP study on thermal donors in proton implanted p-type magnetic Czochralski silicon

AU - Faccinelli, Martin

AU - Kirnstötter, Stefan

AU - Schustereder, Werner

AU - Laven, Johannes G.

AU - Hadley, Peter

PY - 2014

Y1 - 2014

UR - http://onlinelibrary.wiley.com/doi/10.1002/pssc.201400045/abstract

U2 - DOI: 10.1002/pssc.201400045

DO - DOI: 10.1002/pssc.201400045

M3 - Article

SP - 1610

EP - 1642

JO - Physica Status Solidi / C

JF - Physica Status Solidi / C

SN - 1610-1634

ER -