A comprehensive EELS/EFTEM study of focused ion beam prepared samples of nitride- and oxide thin films

Michael Rogers, Gerald Kothleitner, Bernhard Schaffer, W. Waldhauser

Publikation: Konferenzbeitrag › Poster

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@conference{ee62fbd4a9774cd8b77b94d54791ba35,

title = "A comprehensive EELS/EFTEM study of focused ion beam prepared samples of nitride- and oxide thin films",

author = "Michael Rogers and Gerald Kothleitner and Bernhard Schaffer and W. Waldhauser",

year = "2005",

language = "English",

note = "EDGE 2005 ; Conference date: 01-05-2005 Through 05-05-2005",

}