A Combined X-ray Reflectivity, Ellipsometry and Atomic Force Micrsocopy Study on Thin Parylene-C Films

Heinz-Georg Flesch; Oliver Werzer; Martin Weis; Jan Jakabovic; Jaroslav Kovac; Daniel Hasko; Georg Jakopic; Harry J Wondergem; Roland Resel

A Combined X-ray Reflectivity, Ellipsometry and Atomic Force Micrsocopy Study on Thin Parylene-C Films

Heinz-Georg Flesch, Oliver Werzer, Martin Weis, Jan Jakabovic, Jaroslav Kovac, Daniel Hasko, Georg Jakopic, Harry J Wondergem, Roland Resel

Institut für Festkörperphysik (5130)

Publikation: Konferenzbeitrag › Poster

Originalsprache	englisch
Publikationsstatus	Veröffentlicht - 2008
Veranstaltung	XTOP 2008 - Linz, Austria Dauer: 15 Sep 2008 → 19 Sep 2008

Konferenz

Konferenz	XTOP 2008
Ort	Linz, Austria
Zeitraum	15/09/08 → 19/09/08

Treatment code (Nähere Zuordnung)

Experimental

Dieses zitieren

@conference{31ab3bfb0e7343e8a9de201738ac2690,

title = "A Combined X-ray Reflectivity, Ellipsometry and Atomic Force Micrsocopy Study on Thin Parylene-C Films",

author = "Heinz-Georg Flesch and Oliver Werzer and Martin Weis and Jan Jakabovic and Jaroslav Kovac and Daniel Hasko and Georg Jakopic and Wondergem, {Harry J} and Roland Resel",

year = "2008",

language = "English",

note = "XTOP 2008 ; Conference date: 15-09-2008 Through 19-09-2008",

}