Chemistry and Properties of Hydropolysilanes

Projekt: Arbeitsgebiet

Projektdetails

Beschreibung

Chemical and physical proüperties of higher silicon hydrides like cyclopentasilane or neopentasilane are investigated with respect to their applicability as precursors for the deposition of silicon layers for electronic industry
StatusLaufend
Tatsächlicher Beginn/ -es Ende1/10/07 → …